Extreme-ultraviolet (EUV) light source from compact plasma sources are now intensively studied for lithography. The emission of multicharged Xe ions has strong peaks near 11.2 and 13.4 nm and these have been attributed to transition in Xe ¹⁰⁺. It is requested to have modeling of EUV sources and optimization of an effective EUV source.
Recently the spectra of xenon excited in a low inductance vacuum spark were measured at high resolution in the region of 9.5 -15.5 nm [1]. Observed transitions were identified to ions from Xe ⁸⁺ to Xe¹²⁺. In the region of importance for EUV lithography around 13.4 nm, the strongest lines were identified as 4d⁸-4d⁷5p transitions in Xe¹⁰⁺. The experimental data are compared with theoretical data with the Hatree-Fock code of Cowan.
In this paper we calculate the theoretical atomic data for spectra from Xe ¹⁰⁺ in EUV ranges by MCDF (Multiconficuration Dirac-Fock) code [2]. The data are compared with the data listed in ref.[1]. We are going to analyze the spectra which are planned to be measured in LHD and CHS with xenon gas puffing.

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