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Author(s):
Zhijie Li, T. Kenmotsu, T. Kawamura, T. Ono and Y. Yamamura
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Title:
Sputtering Yield Calculations Using an Interatomic Potential with the Shell Effect and a New Local Model
Date of publication:
Oct. 1998
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Key words:
Monte Carlo simulation, sputtering yield, new local model of electronic energy loss, screening length with shell effect
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Abstract:
In order to test the availability of theoretical screening lengths and a new local electronic energy loss model proposed by Yamamura et al., the sputtering yields due to various ion impacts on monatomic materials were calculated with the ACAT code. It is found that the calculated sputtering yields at normal incidence are in good agreement with experimental data and the Yamamura's empirical sputtering formula without free parameters.
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