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Author(s):
T. Kenmotsu, Y. Yamamura, T. Ono and T. Kawamura
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Title:
A New Formula of the Energy Spectrum of Sputtered Atoms from a Target Material Bombarded with Light Ions at Normal Incidence
Date of publication:
May 2001
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Key words:
sputtered energy spectrum, light ion sputtering, a few collision process, low incident energy, normal incidence
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Abstract:
A new formula has been derived to fit the energy spectrum of sputtered atoms from a target material bombarded by light ions. It has been based on Falcone-Sigmund model. The formula shows a better fit with measured energy spectra and simulation results calculated with ACAT code than a Thompson formula for a Ti target material bombarded by 200 eV H^+ ions and by 100 He^+ ions at normal incidence.
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