
Author(s):
T. Ono, M. Ono, K. Shibata, T. Kenmotsu, Z. Li, T. Kawamura
Title:
Calculation of Sputtering Yield with Obliquely Incident LightIons (H^{+}, D^{+},, T^{+},, He^{+},) and its Representation by an Extended Semiempirical Formula
Date of publication:
Apr. 13, 2012
Key words:
Sputtering; Erosion; Plasmamaterial interactions; First wall materials; Fitting formula; MonteCarlo method; binary collision approximation; computer simulation
Abstract:
With a Monte Carlo code ACAT, we have calculated sputtering yield of fifteen fusionrelevant monoatomic materials (Be, B, C, Al, Si, Ti, Cr, Fe, Co, Ni, Cu, Zr, Mo, W, Re) with obliquely incident lightions H^{+}, D^{+}, T^{+,}, He^{+}) at incident energies of 50 eV to 10 keV. An improved formula for dependence of normalized sputtering yield on incidentangle has been fitted to the ACAT data normalized by the normalincidence data to derive the bestfit values of the three physical variables included in the formula vs. incident energy. We then have found suitable functions of incident energy that fit these values most closely. The average relative difference between the normalized ACAT data and the formula with these functions has been shown to be less than 10 % in most cases and less than 20 % for the rest at the incident energies taken up for all of the combinations of the projectiles and the target materials considered. We have also compared the calculated data and the formula with available normalized experimental ones for given incident energies. The bestfit values of the parameters included in the functions have been tabulated in tables for all of the combinations for use.
