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Author(s):
M. Natsir, A. Sagara, K. Tsuzuki, B. Tsuchiya, Y. Hasegawa, O. Motojima
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Title:
Control of Discharge Conditions to Reduce Hydrogen Content in Low Z Films Produced with DC Glow
Date of publication:
Sep. 1995
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Key words:
DC glow, boronization, elastic recoil detection, hydrogen content, H recycling, LHD.
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Abstract:
Boronization at near room temperature has been performed in plasma processing teststand (PPT) by using a 5 % diborane gases B_2 H_6 in He on electrically floating or unfloating Al samples under various conditions on DC glow discharge power or total gas pressure. The hydrogen concentration was analyzed by using elastic recoil detection method (ERD) and a new modified normalizing technique with Rutherford back scattering (RBS). Results showed that a high growth rate of film formation and floating surface were effective in reducing hydrogen concentration in B films. This result was in good agreement with earlier measurements of H with flash filament (FF) desorption method. In particular the H/B ratio was reduced by decreasing ions but increasing radicals for B film formation.
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