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Author(s):
K. Akaishi
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Title:
On the Solution of the Outgassing Equation for the Pump-down of an Unbaked Vacuum System
Date of publication:
Oct. 1997
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Key words:
outgassing rete, Temkin isotherm, coverage, heat of adsorption, mean residence time, sticking probability, pumping parameter
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Abstract:
The outgassing equation based on the Temkin isotherm is presented to consider the outgassing behaviour in the pump-down of an unbaked vacuum system. A method to solve approximartely the equation is discussed first and then solutions of outgassing rates are derived. Discussion is made how to derive appropriate solutions from the equation which are possible to predict the dependence of outgassing rate on pumping time and pumping speed. Solutions obtained finally are possible to explain consistently the outgassing behaviour observed experimentally for 304 stainless steel chamber after exposure to moist air concerning the dependence of outgassing rate on time and pumping speed.
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