Theoretical Atomic Structure Data for Sn and Xe ions
K. Koc, T. Kagawa1), K.Nishihara2)
Department of Computer Science, Pedagogical University, 30-084 Krakow, Poland
Recently Sn and Xe ions attract a considerable attention in developing extreme ultra-violet (EUV) light sources which can emit a light of 13.5nm wavelength. This precise wave length for the light source comes from a requirement of the design for the optical system of a lithography machine. Nishihara et. al. [1] has observed EUV spectra from Sn ions in a tin-plasma. Their spectra consists of a broad peak spread over a wide range of wavelength region including 13.5nm in which the 4d-4f transitions in Sn ions play a major role for the emission. To analyze the experimental spectra, an appropriate plasma model with accurate atomic data for the structure of ions in the plasma is needed.
References
[1] K. Nishihara et. al., Proc. 3rd IFSA (2003).
[2] K. Koc, Y. Ishikawa and T. Kagawa, Chem. Phys. Lett. 231 407 (1994) [3] T. Kagawa, Y. Honda, and S. Kiyokawa, Phys. Rev. A44, 7092 (1991). [4] J. P. Desclaux, Computer Phys. Commun. 9, 31 (1975)
This work was performed under the auspices of the Leading Projects promoted by MEXT (Ministry of Education, Culture, Science and Technology).
|