It has been established that Nitrogen implantation on metals can alter their surface properties which has interesting tribological electronic and optical properties. In this study, the effect of Nitrogen implantation on mechanical and optical properties of Aluminum has been investigated. Aluminum samples prepared in 1.5×3.5cm² and 1.5mm thickness at 99.98% purity. The Al is bombarded by ions with the energy of 80keV and different duration time from 30min to 150min with dose of 10¹⁸ and 10¹⁹ N/cm².
The results of XRD profiles shows the formation of Aluminum nitride phases. Hardness and Nitrogen dose dependence was performed using Vickers instrument. SEM techniques have been used for topographical studies of samples in different conditions. The profiles of Nitrogen distribution in Aluminum have been obtained by using SIMS and RBS. Also the results shown that the crystal growth of AlN surfaces for all samples are same. The hardness of samples increased with increasing the dose and time duration of bombardment but after a maximum in hardness it begins to decrease.