-
Author(s):
Y. Yamamura and H. Tawara
-
Title:
Energy Dependence of Ion-Induced Sputtering Yields from Monoatomic Solids at Normal Incidence
Date of publication:
Mar. 1995
-
Key words:
sputtering yields, monatomic solids, normal incidence, ion impact, analytic expression
-
Abstract:
The yields of the ion-induced sputtering from monoatomic solids at normal incidence for various ion-target combinations are presented graphically as a function of the incident ion energy. In order to fill the lack of the experimental data. the sputtering yields are also calculated by the Monte Carlo simulation code ACAT for some ion-target combinations. Each graph shows available experimental data points and the ACAT data. together with the sputtering yields calculated by the present empirical formula. whose parameters are determined by the best-fit to available data.
-
|
