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Author(s):
Y. Yamamura, K. Sakaoka and H. Tawara
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Title:
Computer Simulation and Data Compilation of Sputtering Yield by Hydrogen Isotopes (^1H^+, ^2D^+, ^3T^+) and Helium (^4He^+) Ion Impact from Monatomic Solids at Normal Incidence
Date of publication:
Oct. 1995
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Key words:
sputtering yields, monatomic solids, normal incidence, Iight-ion impact, empirical formula, Monte Carlo simulation
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Abstract:
The ion-induced sputtering yields from monatomic solids at normal incidence are presented graphically for light-ion (^1H^+, ^2D^+, ^3T^+, ^4He^+) bombardment on various target materials as a function of the incident ion energy. To supplement the experimental data, the sputtering yields are calculated by the Monte Carlo simulation code ACAT for all possible light ion-target combinations. Each graph shows the available experimental and ACAT data points, together with the sputtering yield calculated by the Yamamura and Tawara empirical formula.
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