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Author(s):
S. Born, N. Matsunami and H. Tawara
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Title:
A Simple Theoretical Approach to Determine Relative Ion Yield (RIY) in Glow Discharge Mass Spectrometry (GDMS)
Date of publication:
Jan. 2000
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Key words:
glow discharge, secondary ion mass spectrometry, relative ion yield; electron impact ionization. Penning ionization, sputtering of alloys
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Abstract:
Direct current glow discharge mass spectrometry (dc-GDMS) has been applied to detect impurities in metals. The aim of this study is to understand quantitatively the processes taking place in GDMS and establish a model to calculate the relative ion yield (RIY), which is inversely proportional to the relative sensitivity factor (RSF), in order to achieve better agreement between the calculated and the experimental RIYs. A comparison is made between the calculated RIY of the present model and the experimental RlY, and also with other models.
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