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Author(s):
N. Matsunami, E. Hatanaka, J. Kondoh, H. Hosaka, K. Tsumori, H. Sakaue and H. Tawara
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Title:
Secondary Charged Particle Emission from Proton Conductive Oxides by Ion Impact
Date of publication:
July 2001
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Key words:
secondary electron, secondary ion, proton conductive oxides, ion impact
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Abstract:
Secondary charged particle emission (SCPE) from a proton conductive perovskite oxide, namely, SrCe0.95Yb0.05O3-¦Ä(SCO) film on Si by ion impact was measured using a charge collector method. When the ion projected range is much longer than the film thickness, the SCPE yields are found to be nearly independent of the ion beam current ( IB ) for IB < a few nA, giving the SCPE yields under charge-accumulation free condition, to contrast with the results for the thick polycrystalline SCO which shows a strong dependence of the SCPE yields on the ion beam current. Several corrections are required to evaluate the secondary positive ion yields and a method is described.
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