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Author(s):
T. Ono, K. Shibata, T. Kenmotsu, T. Muramoto, Z. Li c T. Kawamura
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Title:
Extended Incident-Angle Dependence Formula of Sputter Yield
Date of publication:
June 2006
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Key words:
Sputtering, Erosion, Plasma-Materials Interaction, First Wall Materials
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Abstract:
We extend a new semi-empirical formula for incident-angle dependence of normalized sputter yield that includes the contribution to sputter yield from the direct knock-out process that was not considered in the previously proposed one. Three parameters included in the new one are estimated for data calculated with ACAT code for D+ ions incident obliquely on C, Fe and W materials in incident-energy regions from several tens of eV to 10 keV. Then, the parameters are expressed with functions of incident energy. The formula with the functions derived well reproduces that using the ACAT data in the whole energy range.
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