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Author(s):
R. K. Janev, Yu.V. Ralchenko, T. Kenmotsu
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Title:
Unified Analytic Formula for Physical Sputtering Yield at Normal Ion Incidence
Date of publication:
Apr. 2001
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Key words:
physical sputtering, normal incidence, scaling formula
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Abstract:
A new analytic representation of the physical sputtering yield at normal ion incidence is derived providing a unified description of the sputtering data at all impact energies and for all ion-monoatomic-solid-target combinations. The reduced sputtering yield Y is expressed in terms of only one energy parameter eta. The function ilde{Y}(eta) has a simple analytic form and describes all the available experimental and calculated data with an rms deviation of 32%. Tables of the parameters entering the analytic formula for ilde{Y}(eta) are provided for a number of ions and monoatomic solids of interest in fusion and other research fields.
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